Data processing: generic control systems or specific application – Generic control system – apparatus or process – Optimization or adaptive control
Reexamination Certificate
2011-08-30
2011-08-30
Chaki, Kakali (Department: 2122)
Data processing: generic control systems or specific application
Generic control system, apparatus or process
Optimization or adaptive control
C700S028000, C706S904000
Reexamination Certificate
active
08010212
ABSTRACT:
A method of fuzzy control for adjusting a semiconductor machine comprising: providing measurement values from first the “parameter of a pre-semiconductor manufacturing process”, second the “parameter of the semiconductor manufacturing process”, and third the “operation parameter of the semiconductor manufacturing process”; performing a fuzzy control to define two inputs and one output corresponding to the measurement values, wherein the difference between the first and third values, and the difference between the second and third values, forms the two inputs, then from the two inputs one target output is calculated by fuzzy inference; finally, determining if the target output is in or out of an acceptable range. Whereby the target output is the “machine control parameter of the semiconductor manufacturing process” and when within an acceptable range is used for adjusting the semiconductor machine.
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Chen Chun Chi
Lee Yi Feng
Lin Tzu-Cheng
Tian Yun-Zong
Booker Kelvin
Chaki Kakali
Inotera Memories, Inc.
Rosenberg , Klein & Lee
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