4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. Insulated gate formation

Yun Qiang Zhang

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Method of patterning gate electrode with ultra-thin gate...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of patterning gate electrodes with high K gate...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – Insulated gate formation
Reexamination Certificate

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