4. Active solid-state devices (e.g., transistors, solid-state diode
  5. Test or calibration structure

Yukinori Hirose

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Charged particle beam apparatus and method of controlling same

Radiant energy – Inspection of solids or liquids by charged particles – Positive ion probe or microscope type
Reexamination Certificate

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Fabrication method for sample to be analyzed

Measuring and testing – Sampler – sample handling – etc.
Reexamination Certificate

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Semiconductor device and a process of manufacturing the same

Active solid-state devices (e.g. – transistors – solid-state diode – Test or calibration structure
Patent

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Profile ID: LFUS-PAI-P-1727291

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