Capacitance type acceleration sensor

Details Capacitance type acceleration sensor Capacitance type acceleration sensor

2006-02-28

2006-02-28

Chapman, John E. (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

Reexamination Certificate

active

07004026

ABSTRACT:
A capacitance type acceleration sensor includes a semiconductor substrate, a weight portion supported with the substrate through a spring portion, a movable electrode integrated with the weight portion, and a fixed electrode cantilevered with the substrate. The movable electrode is displaced along with a facing surface of the movable electrode in accordance with acceleration. The facing surface of the movable electrode faces a facing surface of the fixed electrode so as to provide a capacitor. The capacitance of the capacitor changes in accordance with a displacement of the movable electrode so that an outer circuit detects the acceleration as a capacitance change. Each facing surface of the movable and fixed electrodes has a concavity and convexity portion for increasing the capacitance change.

REFERENCES:
patent: 6151966 (2000-11-01), Sakai et al.
patent: 6644117 (2003-11-01), Kueck et al.
patent: 6744173 (2004-06-01), Behin et al.

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