4. Coating processes
  5. Coating by vapor, gas, or smoke
  6. Mixture of vapors or gases utilized

Yukihiro Shimogaki

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Method of forming an oxidation-resistant TiSiN film

Coating apparatus – Gas or vapor deposition
Reexamination Certificate

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Method of forming an oxidation-resistant TiSiN film

Coating processes – Coating by vapor – gas – or smoke – Mixture of vapors or gases utilized
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2691955

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