Etching a substrate: processes
Gas phase etching of substrate
Application of energy to the gaseous etchant or to the...
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active
Dry-etch of indium and tin oxides with C2H5I gas
Dry-etching of indium and tin oxides
High-rate dry-etch of indium and tin oxides by hydrogen and halo
Plasma reactor with heated source of a polymer-hardening precurs
Plasma reactor with heated source of a polymer-hardening...
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