4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Yuan Ko Hwang

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Method of spin-on-glass etchback using hot backside helium

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Spin-on-glass etchback uniformity improvement using hot backside

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
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