4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Yu-I Wang

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Microelectronic device having disposable spacer

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Multi-step plasma etch method for plasma etch processing a...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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Multiple etch method for fabricating split gate field effect...

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
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Profile ID: LFUS-PAI-P-2115180

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