Fluid-confining apparatus

Details Fluid-confining apparatus Fluid-confining apparatus

2011-06-28

2011-06-28

Van, Luan V (Department: 1724)

Chemistry: electrical and wave energy

Apparatus

Electrolytic

C204S275100

Reexamination Certificate

active

07967960

ABSTRACT:
The fluid-confining apparatus includes at least a substrate holder, at least a confining fluid supplying tube, at least a confining fluid recovering tube, at least a process fluid supplying tube, and at least a process fluid recovering tube. The process fluid supplying tube supplies at least a process fluid, and makes the process fluid contact with at least a treatment region of a wafer. The confining fluid supplying tube continuity supplies at least a confining fluid. The confining fluid does not dissolve the process fluid. The flowing confining fluid can contact with at least a non-treatment region of the wafer, and confines the process fluid into a predetermined space.

REFERENCES:
patent: 6277260 (2001-08-01), Kaufman
patent: 6521102 (2003-02-01), Dordi
patent: 6558518 (2003-05-01), Sendai
patent: 6773559 (2004-08-01), Woodruff et al.
patent: 6890416 (2005-05-01), Mayer
patent: 2003/0057098 (2003-03-01), Sendai
patent: 2005/0023149 (2005-02-01), Nakada et al.
patent: 2006/0023184 (2006-02-01), Coon

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