Method of controlling statuses of wafers

Details Method of controlling statuses of wafers Method of controlling statuses of wafers

2011-06-07

2011-06-07

Hartman, Jr., Ronald D (Department: 2121)

Data processing: generic control systems or specific application

Specific application, apparatus or process

Product assembly or manufacturing

C438S005000, C702S159000

Reexamination Certificate

active

07957827

ABSTRACT:
A method of controlling statuses of a plurality of wafers is described. A status of a wafer among the wafers is determined. An action related to the status is taken, according to the status determined, to the wafer and/or other wafers to improve a yield or yields thereof.

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Wikipedia's definition for the term “wafer”; 6 pages. Printed from Internet on Mar. 19, 2010.
“90 nm Generation, 300mm Wafer Low k ILD/Cu Interconnect Technology” Jan et al., Jun. 2-4, 2003, pp. 15-17, Logic Technology Development Intel Corporation, Hillsboro, OR, USA.

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