4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

Yu-Chun Huang

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Method for avoiding unetched polymer residue in...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for forming a tapered dual damascene via portion with...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Method of avoiding plasma arcing during RIE etching

Etching a substrate: processes – Gas phase etching of substrate – Irradiating – ion implanting – alloying – diffusing – or...
Reexamination Certificate

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Plasma etch method with enhanced endpoint detection

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Readout circuit for an image sensor and analog-to-digital...

Coded data generation or conversion – Analog to or from digital conversion – Nonlinear
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