4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Youji Takagi

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Semiconductor fabrication apparatus and fabrication method...

Coating processes – Coating by vapor – gas – or smoke
Reexamination Certificate

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Wafer supporting jig and a decompressed gas phase growth method

Coating processes – Coating by vapor – gas – or smoke
Patent

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Wafer supporting jig and a decompressed gas phase growth method

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Profile ID: LFUS-PAI-P-1129770

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