4. Abrasive tool making process, material, or composition
  5. With inorganic material

Youiti Machii

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Abrasive compound for CMP, method for polishing substrate...

Abrading – Abrading process – Utilizing fluent abradant
Reexamination Certificate

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CMP abrasive, method for polishing substrate and method for...

Abrasive tool making process – material – or composition – With inorganic material
Reexamination Certificate

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