4. Coherent light generators
  5. Particular active media
  6. Gas

Youichi Sasaki

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Carbon containing silicon oxide film having high ashing...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Carbon containing silicon oxide film having high ashing...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Discharge excitation type pulse laser apparatus

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Gas laser apparatus for lithography

Coherent light generators – Particular active media – Gas
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2824059

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