4. Radiant energy
  5. Ionic separation or analysis
  6. With sample supply means

Yoshitomo Nakagawa

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Apparatus for repairing a pattern film

Chemistry: electrical and wave energy – Processes and products – Coating – forming or etching by sputtering
Patent

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Inductive plasma mass spectrometer

Radiant energy – Ionic separation or analysis
Patent

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Inductively coupled plasma mass spectrometer

Radiant energy – Ionic separation or analysis – With sample supply means
Patent

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Inductively coupled plasma mass spectrometric and spectrochemica

Radiant energy – Ionic separation or analysis – With sample supply means
Patent

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Inductively coupled plasma mass spectrometry apparatus

Radiant energy – Ionic separation or analysis
Patent

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