4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Yoshinori Momonoi

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Apparatus for cleaning semiconductor wafers in a vacuum...

Brushing – scrubbing – and general cleaning – Machines – With air blast or suction
Reexamination Certificate

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Manufacturing method for semiconductor devices

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method for cleaning semiconductor wafers in a vacuum...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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Method for manufacturing semiconductor device

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Plasma processing system and method for manufacturing a...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – Having glow discharge electrode gas energizing means
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Profile ID: LFUS-PAI-P-2528170

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