4. Adhesive bonding and miscellaneous chemical manufacture
  5. Differential fluid etching apparatus
  6. With microwave gas energizing means

Yoshikazu Nagamura

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Cleaning process for photomasks

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Method and apparatus for cleaning photomask

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Patent

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Method and apparatus for cleaning photomask

Cleaning and liquid contact with solids – Processes – For metallic – siliceous – or calcareous basework – including...
Reexamination Certificate

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Method of and apparatus for washing photomask and washing...

Cleaning and liquid contact with solids – Apparatus – Automatic controls
Reexamination Certificate

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Method of and apparatus for washing photomask and washing...

Cleaning and liquid contact with solids – Processes – Using sequentially applied treating agents
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Profile ID: LFUS-PAI-P-1900264

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