4. Optics: measuring and testing
  5. By dispersed light spectroscopy
  6. Utilizing a spectrometer

Yoko Miyazaki

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Alignment method and semiconductor device

Semiconductor device manufacturing: process – Formation of electrically isolated lateral semiconductive... – Having substrate registration feature
Reexamination Certificate

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Alignment method and semiconductor device

Active solid-state devices (e.g. – transistors – solid-state diode – Alignment marks
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Defect inspection apparatus

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Inspection analyzing apparatus and semiconductor device

Semiconductor device manufacturing: process – With measuring or testing – Electrical characteristic sensed
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Inspection apparatus for foreign matter and pattern defect

Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
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Profile ID: LFUS-PAI-P-332452

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