4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant

Yoji Nomura

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Method for manufacturing semiconductor integrated circuit...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant
Reexamination Certificate

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Semiconductor device and method for manufacturing same

Active solid-state devices (e.g. – transistors – solid-state diode – Responsive to non-electrical signal – Electromagnetic or particle radiation
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2213768

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