4. Coating apparatus
  5. Gas or vapor deposition
  6. Chamber seal

Yoji Iizuka

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Cassette chamber

Material or article handling – Article reorienting device – Article support means rotates about a shiftable pivot point
Patent

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Decompression container

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Decompression container

Coating apparatus – Gas or vapor deposition – Chamber seal
Patent

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Gate valve

Valves and valve actuation – With means to increase head and seat contact pressure – Gate valve
Patent

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Relay apparatus for relaying object to be treated

Metal working – Barrier layer or semiconductor device making
Patent

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Profile ID: LFUS-PAI-P-988359

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