Metal working – Barrier layer or semiconductor device making
Patent
1997-09-09
2000-01-11
Graybill, David E.
Metal working
Barrier layer or semiconductor device making
H01L 2168
Patent
active
060131128
ABSTRACT:
A relay apparatus according to the invention is provided for transferring to-be-treated objects between a transfer mechanism for carrying the objects into and out of a treatment chamber, and a cassette containing the objects. The relay apparatus comprises a transfer unit including holding portions for each holding a corresponding one of the objects from below, the transfer unit transferring the objects between the cassette and a transfer position at which the objects are transferred to the transfer mechanism, while holding the object with the holding portions, and a stopper located in the transfer position for adjusting positions of edge portions of all the objects held by the holding portions of the transfer means, thereby preventing the objects from moving horizontally relative to the holding portions.
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Asakawa Teruo
Iizuka Yoji
Graybill David E.
Tokyo Electron Limited
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