Valves and valve actuation – With means to increase head and seat contact pressure – Gate valve
Patent
1998-04-15
2000-07-25
Fox, John
Valves and valve actuation
With means to increase head and seat contact pressure
Gate valve
251330, F16K 318, H01L 2166
Patent
active
060927860
ABSTRACT:
Provided is a gate valve for opening and closing an aperture formed in a body of a chamber and designed so that an object is loaded into or unloaded from the chamber, comprising a lift mechanism provided on a side portion of the chamber body, a supporting portion supported by a lift mechanism for up-and-down motion, a valve plate supported by the supporting portion and movable between a closed position such as to close the aperture of the chamber body and an open position such that the valve plate is separated from the aperture to leave the aperture open as the supporting portion is moved up and down by the lift mechanism, and a separating mechanism for allowing the valve plate to move to a position ahead of the aperture so that the valve plate is separated from the aperture.
REFERENCES:
patent: 4077552 (1978-03-01), Lothmann
patent: 4199085 (1980-04-01), Watts et al.
Hirose Jun
Iizuka Yoji
Koizumi Hiroshi
Nakagawa Kenichi
Nakagome Tatsuya
Fox John
Tokyo Electron Limited
V Tex Corporation
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