4. Etching a substrate: processes
  5. Gas phase etching of substrate
  6. Application of energy to the gaseous etchant or to the...

Yoichiro Yashiro

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Atmospheric pressure plasma processing method and apparatus

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With heating or cooling means for apparatus part other than...
Reexamination Certificate

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Plasma processing method and apparatus

Etching a substrate: processes – Gas phase etching of substrate – Application of energy to the gaseous etchant or to the...
Reexamination Certificate

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Plasma processing method and apparatus

Electric heating – Metal heating – By arc
Reexamination Certificate

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Plasma processing method and apparatus

Coating processes – Direct application of electrical – magnetic – wave – or... – Plasma
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