4. Optics: measuring and testing
  5. By dispersed light spectroscopy

Ye Yang

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Apparatus and method for e-beam dark imaging with...

Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
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Charge-control method and apparatus for electron beam imaging

Radiant energy – Inspection of solids or liquids by charged particles – Electron probe type
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Systems and methods for correcting optical reflectance...

Optics: measuring and testing – By dispersed light spectroscopy
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