Radiant energy – Inspection of solids or liquids by charged particles – Electron microscope type
Reexamination Certificate
2007-11-30
2010-11-23
Wells, Nikita (Department: 2881)
Radiant energy
Inspection of solids or liquids by charged particles
Electron microscope type
C250S310000
Reexamination Certificate
active
07838833
ABSTRACT:
A method of imaging using an electron beam. An incident electron beam is focused onto the specimen surface, a scattered electron beam is extracted from the specimen surface, and a plurality of dark field signals are detected using a detection system. An interpolated dark field signal is generated using the plurality of dark field signals. In addition, a bright field signal may be detected using the detection system, and a final interpolated signal may be generated using the interpolated dark field signal and the bright field signal. User input may be received which determines a degree of interpolation between two adjacent dark field signals so as to generate the interpolated dark field signal and which determines an amount of interpolation between the interpolated dark field signal and the bright field signal so as to generate a final interpolated signal. Other embodiments, aspects and features are also disclosed.
REFERENCES:
patent: 3622694 (1971-11-01), Liu
patent: 4421985 (1983-12-01), Billingsley et al.
patent: 4547702 (1985-10-01), Schrank
patent: 4716339 (1987-12-01), Roussin
patent: 4945237 (1990-07-01), Shii et al.
patent: 5576543 (1996-11-01), Dingley
patent: 7041976 (2006-05-01), Neil et al.
patent: 7141791 (2006-11-01), Masnaghetti et al.
patent: 7247849 (2007-07-01), Toth et al.
patent: 7307253 (2007-12-01), Yamaguchi et al.
patent: 7439500 (2008-10-01), Frosien et al.
patent: 2006/0043294 (2006-03-01), Yamaguchi et al.
patent: 2006/0060780 (2006-03-01), Masnaghetti et al.
patent: 2006/0226361 (2006-10-01), Frosien et al.
patent: 2007/0158567 (2007-07-01), Nakamura et al.
Borowicz Stanislaw Marek
Krzeczowski Kenneth J.
Lent Matthew
MacDonald Niles Kenneth
Nasser-Ghodsi Mehran
KLA-Tencor Technologies Corporation
Okamoto & Benedicto LLP
Smith Johnnie L
Wells Nikita
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