4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Yaxin Wang

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Adhesion and minimizing oxidation on electroless CO alloy...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Chamber seasoning method to improve adhesion of F-containing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Chemical vapor deposition of ruthenium films for metal...

Coating processes – Coating by vapor – gas – or smoke – Metal coating
Reexamination Certificate

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Cleaning residues from surfaces in a chamber by sputtering...

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
Reexamination Certificate

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CVD deposition method to improve adhesion of F-containing...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Profile ID: LFUS-PAI-P-1897552

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