Substrate processing apparatus and substrate processing system

Details Substrate processing apparatus and substrate processing system Substrate processing apparatus and substrate processing system

2008-05-06

2008-05-06

Lauchman, Layla G. (Department: 2877)

Optics: measuring and testing

By alignment in lateral direction

C356S400000, C382S140000, C382S142000, C382S145000

Reexamination Certificate

active

11120296

ABSTRACT:
It is an object of the present invention to provide a substrate processing apparatus, comprising a housing body mounting unit that is capable of mounting a plurality of housing bodies which can house a plurality of substrates, a processing apparatus main body for processing a substrate extracted from the housing body, a transportation unit for transporting the substrate between the housing body and the processing apparatus main body, a processing control unit for controlling the transportation unit and making it transport the substrate between the housing body and the processing apparatus main body, and a transportation control unit for controlling the transportation unit and making it transport the substrate from one housing body to another housing body without passing through the processing apparatus main body.

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patent: 6082950 (2000-07-01), Altwood et al.
patent: 6559070 (2003-05-01), Mandal
patent: 6963394 (2005-11-01), Yamamoto et al.
patent: 9-162257 (1997-06-01), None
patent: 11-121579 (1999-04-01), None
patent: 2000-077490 (2000-03-01), None

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