4. Coating apparatus
  5. Gas or vapor deposition
  6. Work support

Yasunari Zempo

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Apparatus for vapor-phase growth

Coating apparatus – Gas or vapor deposition – Work support
Patent

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Method for fabricating epitaxial substrate

Semiconductor device manufacturing: process – With measuring or testing
Reexamination Certificate

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Profile ID: LFUS-PAI-P-605252

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