4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Yashraj K. Bhatnagar

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Apparatus and method for efficient and compact remote microwave

Coating apparatus – Gas or vapor deposition – With treating means
Patent

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Apparatus for improving incoming and outgoing wafer...

Semiconductor device manufacturing: process – With measuring or testing – Optical characteristic sensed
Reexamination Certificate

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Profile ID: LFUS-PAI-P-893629

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