4. Coating apparatus
  5. Gas or vapor deposition
  6. With treating means

Yashraj Bhatnagar

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Apparatus for exposing a substrate to plasma radicals

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Reclaiming substrates having defects and contaminants

Data processing: measuring – calibrating – or testing – Testing system
Reexamination Certificate

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Removal of silicon oxycarbide from substrates

Semiconductor device manufacturing: process – Chemical etching – Combined with coating step
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Profile ID: LFUS-PAI-P-2499501

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