4. Measuring and testing
  5. Gas analysis
  6. Moisture content or vapor pressure

Yao-Hsiung Kung

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Device used for detecting clamping force of processed object...

Measuring and testing – Specimen stress or strain – or testing by stress or strain... – Specimen clamp – holder – or support
Reexamination Certificate

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Humidity sensor and fabrication method thereof

Measuring and testing – Gas analysis – Moisture content or vapor pressure
Reexamination Certificate

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Method and apparatus for detecting wafer flaw

Measuring and testing – Vibration – By mechanical waves
Reexamination Certificate

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Wafer cleaning apparatus with multiple wash-heads

Cleaning and liquid contact with solids – Apparatus – With plural means for supplying or applying different fluids...
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2776566

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