4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Xiaoye Zhao

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Chamber recovery after opening barrier over copper

Cleaning and liquid contact with solids – Processes – Including application of electrical radiant or wave energy...
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Gas distribution plate electrode for a plasma reactor

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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Gas distribution plate electrode for a plasma receptor

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Plasma generating
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MERIE plasma reactor with overhead RF electrode tuned to the...

Electric heating – Metal heating – By arc
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MERIE plasma reactor with overhead RF electrode tuned to the...

Electric heating – Metal heating – By arc
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Profile ID: LFUS-PAI-P-1638884

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