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Xiaolin Chen

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Deposition-plasma cure cycle process to enhance film quality...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Deposition-selective etch-deposition process for dielectric...

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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HDP-CVD seasoning process for high power HDP-CVD gapfil to...

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Post deposition plasma treatment to increase tensile stress...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Post deposition plasma treatment to increase tensile stress...

Semiconductor device manufacturing: process – Coating of substrate containing semiconductor region or of... – Insulative material deposited upon semiconductive substrate
Reexamination Certificate

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Profile ID: LFUS-PAI-P-529645

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