4. Semiconductor device manufacturing: process
  5. Electron emitter manufacture

Xiao H. Liu

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BEOL interconnect structures with improved resistance to stress

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum
Reexamination Certificate

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Building metal pillars in a chip for structure support

Active solid-state devices (e.g. – transistors – solid-state diode – Physical configuration of semiconductor – With electrical contact in hole in semiconductor
Reexamination Certificate

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Building metal pillars in a chip for structure support

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
Reexamination Certificate

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Hardmask for improved reliability of silicon based dielectrics

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Semiconductor nanowire with built-in stress

Active solid-state devices (e.g. – transistors – solid-state diode – Thin active physical layer which is
Reexamination Certificate

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Profile ID: LFUS-PAI-P-2388176

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