4. Optics: measuring and testing
  5. By alignment in lateral direction
  6. With light detector

Wolfram A. Bosenberg

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Method of defining a photoresist layer

Coating processes – Electrical product produced – Welding electrode
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Optically testing the lateral dimensions of a pattern

Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
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Optically testing the lateral dimensions of a pattern

Optics: measuring and testing – By configuration comparison – With photosensitive film or plate
Patent

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Photomask alignment system

Optics: measuring and testing – By alignment in lateral direction – With light detector
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