4. Semiconductor device manufacturing: process
  5. Coating with electrically or thermally conductive material
  6. To form ohmic contact to semiconductive material

William Wei-Yen Lee

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Borderless contacts for dual-damascene interconnect process

Semiconductor device manufacturing: process – Coating with electrically or thermally conductive material – To form ohmic contact to semiconductive material
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Global planarization method using plasma etching

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
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