William Ross Brunsvold

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Acid Scavengers for use in chemically amplified photoresists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
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Acid scavengers for use in chemically amplified photoresists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Patent

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Quinone diazo compound containing non-metallic atom

Organic compounds -- part of the class 532-570 series – Organic compounds – Diazooxide or diazotate
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Radiation sensitive silicon-containing resists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Radiation sensitive silicon-containing resists

Radiation imagery chemistry: process – composition – or product th – Imaging affecting physical property of radiation sensitive... – Radiation sensitive composition or product or process of making
Reexamination Certificate

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Profile ID: LFUS-PAI-P-118122

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