Quinone diazo compound containing non-metallic atom

Details Quinone diazo compound containing non-metallic atom Quinone diazo compound containing non-metallic atom

1996-03-15

1997-07-01

Young, Christopher G.

Organic compounds -- part of the class 532-570 series

Organic compounds

Diazooxide or diazotate

534556, 430193, G03F 7022

Patent

active

056440383

ABSTRACT:
Quinone diazo compounds having bonded to the diazo ring or directly bonded to a ring of the compound, certain non-metallic atoms that improve the photosensitivity thereof are provided. These quinone diazo compounds are useful as photoactive compounds in photoresist compositions, and particularly positive photoresist composition employed in x-ray or electron beam radiation. Also provided is a method for preparing compounds of the present invention.

REFERENCES:
patent: 3130047 (1964-04-01), Uhlig et al.
patent: 4465768 (1984-08-01), Ueno et al.
patent: 4588671 (1986-05-01), Molodnyakov et al.
patent: 4661434 (1987-04-01), Iwasaki et al.
patent: 4701399 (1987-10-01), Nagano et al.
patent: 4883739 (1989-11-01), Sakaguichi et al.
patent: 5066564 (1991-11-01), Zertani et al.
patent: 5128231 (1992-07-01), Itoh et al.
patent: 5130392 (1992-07-01), Shwaim et al.
patent: 5141841 (1992-08-01), Wade
patent: 5147758 (1992-09-01), Smothers et al.
patent: 5151341 (1992-09-01), Kim
patent: 5169740 (1992-12-01), Ushirogouchi et al.
patent: 5358824 (1994-10-01), Tan et al.
Kwong et al., Highly Sensitive Positive Resist Systems for Lithographic Applications, IBM Technical Disclosure Bulletin, vol. 24, No. 12 (1982), pp. 6408-6410.
Shingo, Positive Type Photoresist Composition, Patent Abstracts of Japan, vol. 12, No. 235 (1988), and JP-A-63 027835.
Kalibabchuk et al., Effect of Substituent Nature on the Thermolysis of 1,2-Naphthoquinone 2-Diazide 5-Sulfonic Acid Esters, Chemical Abstracts, vol. 90, No. 11 (1979), Abstract No. 86469.
Martynenko et al., Interaction of radiation with materials, IV. Effect of halide atoms on the light sensitivity of aromatic diazo ketones, Chem. Abstracts, vol. 81, No. 17, (1974), Abstract No. 104333, pp. 431-432.
Lakhonina et al., Composition of Light-Sensitive Components of Positive Photoresists, Chem. Abstracts, vol. 110, No. 24, (1989), Abstract No. 222431, pp. 658.

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