4. Etching a substrate: processes
  5. Nongaseous phase etching of substrate
  6. With measuring, testing, or inspecting

William Joseph Surovic

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Indirect endpoint detection by chemical reaction and chemilumine

Etching a substrate: processes – Nongaseous phase etching of substrate – With measuring – testing – or inspecting
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Indirect endpoint detection by chemical reaction and...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – For liquid etchant
Reexamination Certificate

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Rotary signal coupling for chemical mechanical polishing endpoin

Electricity: measuring and testing – Determining nonelectric properties by measuring electric... – Semiconductors for nonelectrical property
Patent

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