4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. With detector

William A. Eckes

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Cooling module for charged particle beam column elements

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Reexamination Certificate

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Electrostatic cassette

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Laminar flow gas diffuser

Fluid sprinkling – spraying – and diffusing – Processes
Patent

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Laser reflector alignment

Optics: measuring and testing – By light interference – For dimensional measurement
Reexamination Certificate

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Specimen distance measuring system

Radiant energy – With charged particle beam deflection or focussing – With detector
Patent

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Profile ID: LFUS-PAI-P-584776

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