Laminar flow gas diffuser

Details Laminar flow gas diffuser Laminar flow gas diffuser

1991-05-24

1993-05-11

Huson, Gregory L.

Fluid sprinkling, spraying, and diffusing

Processes

239499, 239524, 454310, B05B 126

Patent

active

052094022

ABSTRACT:
A laminar flow diffuser has a plurality of round, thin, stacked plates. A central bore penetrates all the plates with the exception of the bottom plate. The diffuser is secured to the vacuum chamber port. When gas enters the port, it enters the central bore and then flows radially outward through the interplate spaces to the outer circumference of the plates and subsequently into the periphery of the chamber. The diffuser thereby provides a controlled laminar flow which prevents turbulence in the chamber and hence, reduces the possibility of contamination to the workpiece in the chamber. The laminar flow diffuser is easily cleaned, both during its initial assembly and later after use, because it chiefly has flat surfaces which do not harbor dirt or gas.

REFERENCES:
patent: 2909866 (1959-10-01), Blue
patent: 3205809 (1965-09-01), Sweeney et al.
patent: 4142456 (1979-03-01), Locker
Daniel B. DeBra, "Design of Laminar Flow Restrictors for Dampling Pneumatic Vibration Isolators," CIRP 34th General Assembly, Aug. 1984, pp. 1-22.

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