4. Optics: measuring and testing
  5. With plural diverse test or art

Wenli Collison

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Apparatus for detecting the endpoint of a photoresist...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With microwave gas energizing means
Reexamination Certificate

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Elevated stationary uniformity ring design

Coating apparatus – Gas or vapor deposition – With treating means
Reexamination Certificate

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Method for improving uniformity and reducing etch rate...

Adhesive bonding and miscellaneous chemical manufacture – Differential fluid etching apparatus – With workpiece support
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Method of an apparatus for obtaining neutral dissociated gas...

Electric lamp and discharge devices: systems – Discharge device load with fluent material supply to the... – Electron or ion source
Reexamination Certificate

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Methods for detecting the endpoint of a photoresist...

Etching a substrate: processes – Gas phase etching of substrate – With measuring – testing – or inspecting
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Profile ID: LFUS-PAI-P-1964740

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