4. Etching a substrate: processes
  5. Masking of a substrate using material resistant to an etchant
  6. Mask resist contains organic compound

Wendy Nguyen

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Method and compositions for hardening photoresist in etching...

Etching a substrate: processes – Masking of a substrate using material resistant to an etchant – Mask resist contains organic compound
Reexamination Certificate

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Method for bilayer resist plasma etch

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
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