4. Semiconductor device manufacturing: process
  5. Making field effect device having pair of active regions...
  6. Having insulated gate

Wen-Shan Wei

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Method for dry cleaning metal etching chamber

Electric heating – Metal heating – By arc
Reexamination Certificate

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Method for forming an inter-layer dielectric layer

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Reexamination Certificate

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Method of fabricating a lower electrode of capacitor

Semiconductor device manufacturing: process – Making field effect device having pair of active regions... – Having insulated gate
Patent

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Profile ID: LFUS-PAI-P-696572

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