Radiation imagery chemistry: process, composition, or product th
Radiation modifying product or process of making
Radiation mask
Inventor
active
Mask and simplified method of forming a mask integrating attenua
Method of forming multiple layer attenuating phase shifting mask
Method of forming multiple layer attenuating phase shifting mask
OPC-like repair method for attenuated phase shift masks
Process to fabricate a double layer attenuated phase shift mask
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