4. Semiconductor device manufacturing: process
  5. Chemical etching
  6. Vapor phase etching

Wen-Ben Chou

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Clean chemistry low-k organic polymer etch

Semiconductor device manufacturing: process – Chemical etching
Reexamination Certificate

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Method and apparatus for nitride spacer etch process...

Semiconductor device manufacturing: process – Including control responsive to sensed condition – Optical characteristic sensed
Reexamination Certificate

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Methods and apparatus for reducing charging during plasma proces

Semiconductor device manufacturing: process – Chemical etching – Vapor phase etching
Patent

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Profile ID: LFUS-PAI-P-1656375

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