Bulk micromachined inductive transducers on silicon

Details Bulk micromachined inductive transducers on silicon Bulk micromachined inductive transducers on silicon

1995-06-01

1998-03-03

Donovan, Lincoln

Electricity: magnetically operated switches, magnets, and electr

Electromagnetically actuated switches

Polarity-responsive

361160, 257415, H01H 5122

Patent

active

057240159

ABSTRACT:
A bulk micromachined inductive transducer on single crystal silicon. The bulk micromachined micro-device has movable parts integrated with electromagnetically-driven microactuators for moving the parts. The integrated electromagnetic microactuators of the present micromachine move the movable parts in in-plane and/or out-of-plane sub-millimeter level motions in either translational or rotational directions.

REFERENCES:
patent: 4386244 (1983-05-01), Murakami et al.
patent: 5398011 (1995-03-01), Kimura et al.

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