X-ray or gamma ray systems or devices
Specific application
Lithography
Inventor
active
Collimator for x-ray proximity lithography
Pharmaceutically enhanced low-energy radiosurgery
Pharmaceutically enhanced low-energy radiosurgery
Spherical mirror grazing incidence x-ray optics
X-ray collimator for lithography
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Profile ID: LFUS-PAI-P-818253