4. Radiant energy
  5. With charged particle beam deflection or focussing
  6. Magnetic lens

Walter E. Perkins, Jr.

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Contrast enhancement of electron beam alignment marks

Radiant energy – Irradiation of objects or material – Irradiation of semiconductor devices
Patent

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Electron and ion beam-shaping apparatus

Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent

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Profile ID: LFUS-PAI-P-1492374

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