Radiant energy – With charged particle beam deflection or focussing – Magnetic lens
Patent
1983-08-22
1985-12-24
Anderson, Bruce C.
Radiant energy
With charged particle beam deflection or focussing
Magnetic lens
250398, 2504922, H01J 37302, H01J 37147
Patent
active
045608784
ABSTRACT:
Electron or ion beam shaping apparatus has first aperture (28) and second aperture (30) through which the beam (20) is focused by first lens (24). Double deflection apparatus of either electromagnetic or electrostatic character is small and can be positioned between the aperture plates so that the image of both apertures can be focused on the target (16). Double deflection serves to vary spot size and shape and assures that target current density does not change while spot size is varied.
REFERENCES:
patent: 4218621 (1980-08-01), Nakasuji et al.
Pfeiffer et al., "Advanced Beam Shaping . . . ", 8th Int. Conf. Electron and Ion Beam Science and Technology, 1978, pp. 149-159.
Knauer Wolfgang
Perkins, Jr. Walter E.
Anderson Bruce C.
Berman Jack I.
Hughes Aircraft Company
Karambelas A. W.
Sarjeant John A.
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